Instruments used for micro-nano observation, often have optical components with lifespans spanning several decades. While piezo inertial actuators offer the benefit of a compact structure, their limited travel life due to frictional wear poses a challenge for adapting to such applications. Currently, direct-drive piezo and electromagnetic hybrid drives are the preferred commercial solutions; however, hybrid systems tend to increase overall system complexity and size. In this work, we present a compact, wear-adaptive piezo inertial actuator that combines long travel life with cross-scale driving capabilities. Its unique structure ensures stable normal force between friction pairs under surface-to-surface contact conditions, with systematic analysis demonstrating its feasibility for wear adaptation. The XY degrees of freedom (DOFs) exhibited bidirectional motion velocities exceeding 11 mm/s at 2100 Hz and 100 Vp-p. For the Z DOF, at 900 Hz and 100 Vp-p, the forward and reverse velocities were 3.53 mm/s and −4.79 mm/s, respectively. A dual-mode control system integrating fuzzy adaptive PID control and traditional PID control for stepping and scanning modes was developed, effectively addressing the limitations of traditional PID control such as excessive tracking error and slow convergence caused by frequent mode switching. The proposed actuator was applied for various tasks, including graphene surface mechanical characterization, integrated circuit inspection, micro-nano structure detection, and biological cell observation using atomic force and optical microscopes.

中文翻译：

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一种长行程寿命压电惯性驱动及其在微纳观测中的应用

用于微纳观测的仪器通常具有使用寿命长达数十年的光学元件。虽然压电惯性促动器具有结构紧凑的优势，但由于摩擦磨损，其行程寿命有限，对适应此类应用构成了挑战。目前，直驱压电陶瓷和电磁混合动力驱动是首选的商业解决方案;但是，混合系统往往会增加整体系统的复杂性和大小。在这项工作中，我们提出了一种紧凑的、可穿戴的压电惯性促动器，它结合了长行程寿命和跨尺度驾驶能力。其独特的结构确保了在表面对表面接触条件下摩擦副之间稳定的法向力，系统分析证明了其磨损适应的可行性。XY 自由度 （DOF） 在 2100 Hz 和 100 Vp-p 时表现出超过 11 mm/s 的双向运动速度。对于 Z 自由度，在 900 Hz 和 100 Vp-p 时，正向和反向速度分别为 3.53 mm/s 和 -4.79 mm/s。开发了一种集模糊自适应 PID 控制与传统 PID 控制于一体的步进和扫描模式双模控制系统，有效解决了传统 PID 控制频繁切换导致的跟踪误差过大、收敛慢等局限性。所提出的致动器应用于各种任务，包括石墨烯表面力学表征、集成电路检测、微纳结构检测以及使用原子力和光学显微镜进行生物细胞观察。